Loaded microscope plugin FEIScopePlugin.dll (named FEIScope) Greetings from NYSBC! This is the FEI Tecnai F20 with DE-20 Camera System at NYSBC. The last properties file change was 04/05/2016. SerialEM Version 3.5.4 64-bit, built Mar 7 2016 21:45:24 Started 9/28/2017 14:37:31 1 summed frames were saved to D:\RawFrames\DE20\20170928_02400_gain_000_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02401_gain_001_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02402_gain_002_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02403_gain_003_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02404_gain_004_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02405_gain_005_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02406_gain_006_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02407_gain_007_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02408_gain_008_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02409_gain_009_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02410_gain_010_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02411_gain_011_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02412_gain_012_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02413_gain_013_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02414_gain_014_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02415_gain_015_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02416_gain_016_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02417_gain_017_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02418_gain_018_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02419_gain_019_0p0 Unable to calibrate electron dose with this picture. The beam intensity is outside the calibrated range for this spot size. 1 summed frames were saved to D:\RawFrames\DE20\20170928_02419_gain_019_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02432_gain_020_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02433_gain_021_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02434_gain_022_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02435_gain_023_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02436_gain_024_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02437_gain_025_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02438_gain_026_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02439_gain_027_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02440_gain_028_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02441_gain_029_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02442_gain_030_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02443_gain_031_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02444_gain_032_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02445_gain_033_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02446_gain_034_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02447_gain_035_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02448_gain_036_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02449_gain_037_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02450_gain_038_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02451_gain_039_0p0 Unable to calibrate electron dose with this picture. The beam intensity is outside the calibrated range for this spot size. 1 summed frames were saved to D:\RawFrames\DE20\20170928_02451_gain_039_0p0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02453_040_0p0 Min = 0.0, max = 27260.0, mean = 1297.81, SD = 317.23 Pixel size = 0.234 nm 25.790 electrons (4061.99 counts) per unbinned pixel per second 8 summed frames were saved to D:\RawFrames\DE20\20170928_02454_041_0p0 Min = -3900.0, max = 32767.0, mean = 1731.12, SD = 364.86 Pixel size = 0.234 nm 34.401 electrons (5418.21 counts) per unbinned pixel per second 8 summed frames were saved to D:\RawFrames\DE20\20170928_02455_042_0p0 Min = -4260.0, max = 32767.0, mean = 2124.17, SD = 401.04 Pixel size = 0.234 nm 42.212 electrons (6648.40 counts) per unbinned pixel per second 8 summed frames were saved to D:\RawFrames\DE20\20170928_02456_043_0p0 Min = -2660.0, max = 32767.0, mean = 2862.35, SD = 456.12 Pixel size = 0.234 nm 56.882 electrons (8958.84 counts) per unbinned pixel per second 8 summed frames were saved to D:\RawFrames\DE20\20170928_02457_044_0p0 Min = -4540.0, max = 32767.0, mean = 2337.36, SD = 418.21 Pixel size = 0.234 nm 46.449 electrons (7315.67 counts) per unbinned pixel per second 8 summed frames were saved to D:\RawFrames\DE20\20170928_02458_045_0p0 Min = -4060.0, max = 32767.0, mean = 2748.78, SD = 446.97 Pixel size = 0.234 nm 54.625 electrons (8603.38 counts) per unbinned pixel per second 1 summed frames were saved to D:\RawFrames\DE20\20170928_02471_gain_046_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02472_gain_047_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02473_gain_048_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02474_gain_049_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02475_gain_050_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02476_gain_051_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02477_gain_052_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02478_gain_053_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02479_gain_054_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02480_gain_055_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02481_gain_056_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02482_gain_057_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02483_gain_058_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02484_gain_059_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02485_gain_060_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02486_gain_061_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02487_gain_062_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02488_gain_063_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02489_gain_064_0p0 1 summed frames were saved to D:\RawFrames\DE20\20170928_02490_gain_065_0p0 Dose rate calculated to be 9.89 electrons/square Angstrom/sec for spot 3, C2 51.99% 54.14 electrons/unbinned pixel/sec 1 summed frames were saved to D:\RawFrames\DE20\20170928_02490_gain_065_0p0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02491_066_0p0 Min = -340.0, max = 6130.0, mean = 2683.27, SD = 443.28 Pixel size = 0.234 nm 53.323 electrons (8398.34 counts) per unbinned pixel per second Rough eucentricity: changing Z by 9.76 to 81.97, finished. Refining eucentricity: Fit to 8 positions gives tilt axis Z displacement of 1.64 microns and lateral displacement of 0.19 microns 8 summed frames were saved to D:\RawFrames\DE20\20170928_02494_067_0p0 Measured defocus = -3.31 microns drift = 1.10 nm/sec Need regular tracking - Need autofocus Tracking image shifted -0.012, 0.075 um; position 0.153, 0.131 Measured defocus = -4.21 microns drift = 0.43 nm/sec Tracking image shifted -0.000, 0.021 um; position 0.153, 0.110 8 summed frames were saved to D:\RawFrames\DE20\20170928_02498_HA_fast1_000_18p0 Saved Z = 0 at 0.00 min Tilt = 18.00 Mean = 2503 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.153 0.110 3.521 Need regular tracking - Need autofocus Tracking image shifted 0.017, 0.069 um; position 0.136, 0.041 Measured defocus = -3.94 microns drift = 0.27 nm/sec Tracking image shifted 0.001, 0.001 um; position 0.135, 0.039 8 summed frames were saved to D:\RawFrames\DE20\20170928_02499_HA_fast1_001_15p1 Record image shifted 0.002, -0.009 um Tracking reference shifted by 10.1,2.2 pixels, 0.002,-0.009 um Saved Z = 1 at 0.77 min Tilt = 15.15 Mean = 2518 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.133 0.049 3.458 Predicted X = 0.113 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.012 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 3.395 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.014, -0.017 um; position 0.127, 0.005 Measured defocus = -4.09 microns drift = 0.41 nm/sec Tracking image shifted 0.001, -0.002 um; position 0.126, 0.007 8 summed frames were saved to D:\RawFrames\DE20\20170928_02500_HA_fast1_002_12p3 Record image shifted -0.000, -0.008 um Tracking reference shifted by 8.3,-0.3 pixels, -0.000,-0.008 um Saved Z = 2 at 1.55 min Tilt = 12.25 Mean = 2525 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.126 0.014 3.488 Errors in X/Y Prediction 0.013 0.027 um, 1.7 3.6 % Error in Z Prediction 0.093 Predicted X = 0.119 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.038 StdErr = 0.020 nFit = 3 nDrop = 0 Predicted Z = 3.456 StdErr = 0.070 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.004, -0.029 um; position 0.122, -0.009 8 summed frames were saved to D:\RawFrames\DE20\20170928_02501_HA_fast1_003_9p3 Record image shifted 0.001, -0.008 um Tracking reference shifted by 8.9,1.3 pixels, 0.001,-0.008 um Saved Z = 3 at 2.04 min Tilt = 9.32 Mean = 2528 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.121 -0.001 3.456 Errors in X/Y Prediction 0.002 0.037 um, 0.3 5.0 % Predicted X = 0.116 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.029 StdErr = 0.014 nFit = 3 nDrop = 0 Predicted Z = 3.439 StdErr = 0.092 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.005, -0.003 um; position 0.121, -0.026 Measured defocus = -4.10 microns drift = 0.41 nm/sec Tracking image shifted 0.002, -0.003 um; position 0.119, -0.023 8 summed frames were saved to D:\RawFrames\DE20\20170928_02502_HA_fast1_004_6p4 Record image shifted -0.001, -0.006 um Tracking reference shifted by 6.7,-1.0 pixels, -0.001,-0.006 um Saved Z = 4 at 2.81 min Tilt = 6.36 Mean = 2537 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.120 -0.017 3.536 Errors in X/Y Prediction 0.004 0.012 um, 0.5 1.7 % Error in Z Prediction 0.097 Predicted X = 0.119 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.032 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Z = 3.563 StdErr = 0.005 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.011, 0.009 um; position 0.130, -0.042 8 summed frames were saved to D:\RawFrames\DE20\20170928_02503_HA_fast1_005_3p4 Record image shifted -0.000, -0.012 um Tracking reference shifted by 12.4,-0.1 pixels, -0.000,-0.012 um Saved Z = 5 at 3.30 min Tilt = 3.38 Mean = 2538 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.130 -0.030 3.563 Errors in X/Y Prediction 0.011 0.002 um, 1.5 0.3 % Predicted X = 0.140 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.043 StdErr = 0.002 nFit = 4 nDrop = 0 Predicted Z = 3.589 StdErr = 0.006 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.007, 0.012 um; position 0.147, -0.055 8 summed frames were saved to D:\RawFrames\DE20\20170928_02504_HA_fast1_006_0p4 Record image shifted -0.000, -0.011 um Tracking reference shifted by 11.8,-0.1 pixels, -0.000,-0.011 um Saved Z = 6 at 3.79 min Tilt = 0.39 Mean = 2540 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.147 -0.044 3.589 Errors in X/Y Prediction 0.007 -0.001 um, 1.0 0.1 % Predicted X = 0.165 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.057 StdErr = 0.002 nFit = 4 nDrop = 0 Predicted Z = 3.615 StdErr = 0.007 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -3.95 microns drift = 0.27 nm/sec 8 summed frames were saved to D:\RawFrames\DE20\20170928_02505_HA_fast1_007_-2p6 Record image shifted -0.012, -0.002 um Saved Z = 7 at 4.34 min Tilt = -2.61 Mean = 2545 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.177 -0.055 3.560 Errors in X/Y Prediction 0.012 0.002 um, 1.6 0.2 % Error in Z Prediction -0.055 Predicted X = 0.206 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.065 StdErr = 0.003 nFit = 4 nDrop = 0 Predicted Z = 3.579 StdErr = 0.025 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.005, 0.043 um; position 0.201, -0.108 8 summed frames were saved to D:\RawFrames\DE20\20170928_02506_HA_fast1_008_-5p6 Record image shifted 0.000, -0.021 um Tracking reference shifted by 22.6,0.2 pixels, 0.000,-0.021 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 8 at 4.83 min Tilt = -5.61 Mean = 2545 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.201 -0.087 3.579 Errors in X/Y Prediction -0.005 -0.022 um, 0.7 3.0 % Predicted X = 0.225 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.122 StdErr = 0.017 nFit = 4 nDrop = 0 Predicted Z = 3.593 StdErr = 0.028 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.016, 0.030 um; position 0.208, -0.152 8 summed frames were saved to D:\RawFrames\DE20\20170928_02507_HA_fast1_009_-8p6 Record image shifted 0.005, -0.032 um Tracking reference shifted by 34.3,5.6 pixels, 0.005,-0.032 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 9 at 5.35 min Tilt = -8.60 Mean = 2548 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.203 -0.120 3.593 Errors in X/Y Prediction -0.022 0.002 um, 2.9 0.3 % Predicted X = 0.206 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.169 StdErr = 0.014 nFit = 4 nDrop = 0 Predicted Z = 3.607 StdErr = 0.031 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.005, 0.007 um; position 0.211, -0.177 8 summed frames were saved to D:\RawFrames\DE20\20170928_02508_HA_fast1_010_-11p6 Record image shifted 0.005, -0.039 um Tracking reference shifted by 42.1,5.3 pixels, 0.005,-0.039 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 10 at 5.87 min Tilt = -11.56 Mean = 2541 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.206 -0.137 3.607 Errors in X/Y Prediction 0.000 0.032 um, 0.0 4.3 % Predicted X = 0.208 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.151 StdErr = 0.011 nFit = 4 nDrop = 0 Predicted Z = 3.621 StdErr = 0.035 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.006, 0.041 um; position 0.214, -0.192 Measured defocus = -4.13 microns drift = 0.39 nm/sec Tracking image shifted 0.005, -0.021 um; position 0.209, -0.171 8 summed frames were saved to D:\RawFrames\DE20\20170928_02509_HA_fast1_011_-14p5 Record image shifted 0.005, -0.030 um Tracking reference shifted by 32.1,4.9 pixels, 0.005,-0.030 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 11 at 6.68 min Tilt = -14.50 Mean = 2545 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.204 -0.141 3.759 Errors in X/Y Prediction -0.004 0.010 um, 0.5 1.4 % Error in Z Prediction 0.138 Predicted X = 0.202 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.129 StdErr = 0.001 nFit = 4 nDrop = 0 Predicted Z = 3.771 StdErr = 0.087 nFit = 3 nDrop = 0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02510_HA_fast1_012_-17p4 Record image shifted -0.005, 0.023 um Saved Z = 12 at 7.17 min Tilt = -17.41 Mean = 2534 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.207 -0.152 3.771 Errors in X/Y Prediction 0.005 -0.023 um, 0.6 3.1 % Predicted X = 0.211 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.155 StdErr = 0.015 nFit = 4 nDrop = 0 Predicted Z = 3.804 StdErr = 0.095 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.004, 0.050 um; position 0.214, -0.206 8 summed frames were saved to D:\RawFrames\DE20\20170928_02511_HA_fast1_013_-20p3 Record image shifted 0.004, -0.049 um Tracking reference shifted by 52.7,4.4 pixels, 0.004,-0.049 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 13 at 7.67 min Tilt = -20.27 Mean = 2527 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.210 -0.156 3.804 Errors in X/Y Prediction -0.000 -0.001 um, 0.1 0.1 % Predicted X = 0.213 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.165 StdErr = 0.010 nFit = 4 nDrop = 0 Predicted Z = 3.837 StdErr = 0.103 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.10 microns drift = 0.31 nm/sec 8 summed frames were saved to D:\RawFrames\DE20\20170928_02512_HA_fast1_014_-23p1 Record image shifted 0.003, 0.009 um Saved Z = 14 at 8.36 min Tilt = -23.09 Mean = 2541 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.210 -0.173 3.934 Errors in X/Y Prediction -0.003 -0.009 um, 0.4 1.2 % Error in Z Prediction 0.098 Predicted X = 0.209 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.188 StdErr = 0.013 nFit = 4 nDrop = 0 Predicted Z = 3.982 StdErr = 0.018 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.010, 0.046 um; position 0.219, -0.234 8 summed frames were saved to D:\RawFrames\DE20\20170928_02513_HA_fast1_015_-25p8 Record image shifted 0.004, -0.055 um Tracking reference shifted by 58.4,4.7 pixels, 0.004,-0.055 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 15 at 8.85 min Tilt = -25.84 Mean = 2530 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.215 -0.179 3.982 Errors in X/Y Prediction 0.006 0.009 um, 0.8 1.2 % Predicted X = 0.220 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.192 StdErr = 0.016 nFit = 4 nDrop = 0 Predicted Z = 4.035 StdErr = 0.019 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.006, 0.042 um; position 0.226, -0.235 8 summed frames were saved to D:\RawFrames\DE20\20170928_02514_HA_fast1_016_-28p5 Record image shifted 0.003, -0.046 um Tracking reference shifted by 49.1,3.6 pixels, 0.003,-0.046 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 16 at 9.36 min Tilt = -28.54 Mean = 2523 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.223 -0.189 4.035 Errors in X/Y Prediction 0.002 0.004 um, 0.3 0.5 % Predicted X = 0.230 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.191 StdErr = 0.010 nFit = 4 nDrop = 0 Predicted Z = 4.088 StdErr = 0.021 nFit = 3 nDrop = 0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02515_HA_fast1_017_-31p2 Record image shifted -0.002, 0.006 um Saved Z = 17 at 9.85 min Tilt = -31.18 Mean = 2514 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.232 -0.197 4.088 Errors in X/Y Prediction 0.002 -0.006 um, 0.2 0.8 % Predicted X = 0.240 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.206 StdErr = 0.003 nFit = 4 nDrop = 0 Predicted Z = 4.142 StdErr = 0.023 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.02 microns drift = 0.58 nm/sec 8 summed frames were saved to D:\RawFrames\DE20\20170928_02516_HA_fast1_018_-33p7 Record image shifted -0.004, -0.007 um Saved Z = 18 at 10.39 min Tilt = -33.74 Mean = 2512 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.244 -0.199 4.166 Errors in X/Y Prediction 0.004 0.007 um, 0.5 1.0 % Error in Z Prediction 0.025 Predicted X = 0.254 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.200 StdErr = 0.002 nFit = 4 nDrop = 0 Predicted Z = 4.225 StdErr = 0.002 nFit = 3 nDrop = 0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02517_HA_fast1_019_-36p2 Record image shifted -0.006, 0.029 um Saved Z = 19 at 10.48 min Tilt = -36.24 Mean = 2507 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.261 -0.229 4.225 Errors in X/Y Prediction 0.006 -0.029 um, 0.8 3.9 % Predicted X = 0.274 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.261 StdErr = 0.021 nFit = 4 nDrop = 0 Predicted Z = 4.283 StdErr = 0.002 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.008, 0.031 um; position 0.282, -0.292 8 summed frames were saved to D:\RawFrames\DE20\20170928_02518_HA_fast1_020_-38p7 Record image shifted -0.002, -0.092 um Tracking reference shifted by 98.5,-2.7 pixels, -0.002,-0.092 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 20 at 10.96 min Tilt = -38.65 Mean = 2493 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.285 -0.200 4.283 Errors in X/Y Prediction 0.011 0.061 um, 1.4 8.2 % Predicted X = 0.304 StdErr = 0.006 nFit = 3 nDrop = 0 Predicted Y = -0.177 StdErr = 0.056 nFit = 4 nDrop = 0 Predicted Z = 4.341 StdErr = 0.002 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.007, 0.080 um; position 0.296, -0.257 8 summed frames were saved to D:\RawFrames\DE20\20170928_02519_HA_fast1_021_-41p0 Record image shifted -0.011, -0.089 um Tracking reference shifted by 95.0,-12.4 pixels, -0.011,-0.089 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 21 at 11.48 min Tilt = -41.00 Mean = 2489 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.308 -0.168 4.341 Errors in X/Y Prediction 0.004 0.009 um, 0.5 1.2 % Predicted X = 0.332 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.091 StdErr = 0.036 nFit = 4 nDrop = 0 Predicted Z = 4.399 StdErr = 0.003 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.014, 0.141 um; position 0.317, -0.232 8 summed frames were saved to D:\RawFrames\DE20\20170928_02520_HA_fast1_022_-43p3 Record image shifted -0.014, -0.085 um Tracking reference shifted by 90.9,-14.9 pixels, -0.014,-0.085 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 22 at 11.99 min Tilt = -43.26 Mean = 2479 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.331 -0.147 4.399 Measured defocus = -2.88 microns drift = 1.19 nm/sec Errors in X/Y Prediction -0.001 -0.056 um, 0.1 7.5 % Need regular tracking - Need autofocus Tracking image shifted -0.040, -0.048 um; position 0.220, 0.160 Measured defocus = -4.12 microns drift = 1.09 nm/sec Tracking image shifted -0.014, 0.057 um; position 0.234, 0.103 8 summed frames were saved to D:\RawFrames\DE20\20170928_02521_HA_fast1_023_20p9 Record image shifted -0.008, 0.029 um Tracking reference shifted by -31.4,-8.2 pixels, -0.008,0.029 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 23 at 13.90 min Tilt = 20.85 Mean = 2527 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.242 0.074 3.424 Need regular tracking - Need autofocus Tracking image shifted -0.009, -0.017 um; position 0.251, 0.090 Measured defocus = -3.69 microns drift = 2.28 nm/sec Tracking image shifted -0.030, 0.077 um; position 0.281, 0.013 8 summed frames were saved to D:\RawFrames\DE20\20170928_02522_HA_fast1_024_23p7 Record image shifted -0.029, 0.053 um Tracking reference shifted by -57.0,-31.0 pixels, -0.029,0.053 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 24 at 14.69 min Tilt = 23.66 Mean = 2519 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.310 -0.040 3.146 Predicted X = 0.378 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.154 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 2.869 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.058, -0.124 um; position 0.320, -0.030 Measured defocus = -4.28 microns drift = 0.59 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.97 microns drift = 0.73 nm/sec Tracking image shifted -0.021, 0.045 um; position 0.341, -0.075 8 summed frames were saved to D:\RawFrames\DE20\20170928_02523_HA_fast1_025_26p4 Record image shifted -0.027, 0.049 um Tracking reference shifted by -52.8,-29.1 pixels, -0.027,0.049 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 25 at 15.57 min Tilt = 26.40 Mean = 2511 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.368 -0.124 3.135 Errors in X/Y Prediction -0.010 0.030 um, 1.4 4.1 % Error in Z Prediction 0.266 Predicted X = 0.426 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.228 StdErr = 0.023 nFit = 3 nDrop = 0 Predicted Z = 2.946 StdErr = 0.198 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.049, -0.104 um; position 0.377, -0.124 Measured defocus = -4.17 microns drift = 0.43 nm/sec Tracking image shifted -0.012, 0.041 um; position 0.389, -0.166 8 summed frames were saved to D:\RawFrames\DE20\20170928_02524_HA_fast1_026_29p1 Record image shifted -0.020, 0.042 um Tracking reference shifted by -44.6,-21.3 pixels, -0.020,0.042 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 26 at 16.36 min Tilt = 29.09 Mean = 2501 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.409 -0.207 3.137 Errors in X/Y Prediction -0.017 0.020 um, 2.3 2.8 % Error in Z Prediction 0.191 Predicted X = 0.450 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.291 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Z = 3.130 StdErr = 0.010 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.033, -0.081 um; position 0.416, -0.210 8 summed frames were saved to D:\RawFrames\DE20\20170928_02525_HA_fast1_027_31p7 Record image shifted -0.018, 0.063 um Tracking reference shifted by -66.9,-19.2 pixels, -0.018,0.063 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 27 at 16.88 min Tilt = 31.71 Mean = 2493 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.434 -0.272 3.130 Errors in X/Y Prediction -0.015 0.019 um, 2.1 2.5 % Predicted X = 0.470 StdErr = 0.011 nFit = 3 nDrop = 0 Predicted Y = -0.349 StdErr = 0.014 nFit = 3 nDrop = 0 Predicted Z = 3.125 StdErr = 0.014 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.027, -0.070 um; position 0.443, -0.280 8 summed frames were saved to D:\RawFrames\DE20\20170928_02526_HA_fast1_028_34p3 Record image shifted -0.017, 0.073 um Tracking reference shifted by -77.7,-18.4 pixels, -0.017,0.073 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 28 at 17.40 min Tilt = 34.26 Mean = 2476 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.461 -0.353 3.125 Errors in X/Y Prediction -0.010 -0.003 um, 1.3 0.4 % Predicted X = 0.487 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.423 StdErr = 0.022 nFit = 4 nDrop = 0 Predicted Z = 3.120 StdErr = 0.017 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.017, -0.060 um; position 0.470, -0.363 Measured defocus = -3.86 microns drift = 0.38 nm/sec Tracking image shifted -0.011, 0.063 um; position 0.481, -0.426 8 summed frames were saved to D:\RawFrames\DE20\20170928_02527_HA_fast1_029_36p7 Record image shifted -0.017, 0.046 um Tracking reference shifted by -49.6,-18.4 pixels, -0.017,0.046 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 29 at 18.19 min Tilt = 36.74 Mean = 2469 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.498 -0.472 3.023 Errors in X/Y Prediction 0.011 -0.049 um, 1.5 6.6 % Error in Z Prediction -0.097 Predicted X = 0.528 StdErr = 0.008 nFit = 3 nDrop = 0 Predicted Y = -0.613 StdErr = 0.016 nFit = 4 nDrop = 0 Predicted Z = 2.997 StdErr = 0.038 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.022, -0.135 um; position 0.506, -0.478 8 summed frames were saved to D:\RawFrames\DE20\20170928_02528_HA_fast1_030_39p1 Record image shifted -0.019, 0.094 um Tracking reference shifted by -100.2,-20.1 pixels, -0.019,0.094 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 30 at 18.70 min Tilt = 39.14 Mean = 2453 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.525 -0.572 2.997 Errors in X/Y Prediction -0.003 0.042 um, 0.4 5.6 % Predicted X = 0.558 StdErr = 0.008 nFit = 3 nDrop = 0 Predicted Y = -0.695 StdErr = 0.039 nFit = 4 nDrop = 0 Predicted Z = 2.967 StdErr = 0.044 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.023, -0.117 um; position 0.535, -0.578 8 summed frames were saved to D:\RawFrames\DE20\20170928_02529_HA_fast1_031_41p5 Record image shifted -0.072, 0.125 um Tracking reference shifted by -133.2,-76.6 pixels, -0.072,0.125 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 31 at 19.97 min Tilt = 41.47 Mean = 2433 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.607 -0.703 2.967 Errors in X/Y Prediction 0.048 -0.008 um, 6.5 1.0 % Predicted X = 0.652 StdErr = 0.041 nFit = 3 nDrop = 0 Predicted Y = -0.827 StdErr = 0.034 nFit = 4 nDrop = 0 Predicted Z = 2.936 StdErr = 0.051 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.037, -0.122 um; position 0.615, -0.705 8 summed frames were saved to D:\RawFrames\DE20\20170928_02530_HA_fast1_032_43p7 Record image shifted -0.064, 0.129 um Tracking reference shifted by -138.0,-68.6 pixels, -0.064,0.129 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 32 at 21.65 min Tilt = 43.72 Mean = 2413 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.679 -0.834 2.936 2017/09/28 15:24 D:\serialem\hwei\092817\HA_fast1.st 0 33 3712 4984 1221 18.0 43.7 3.00 COS 21.7 1x1 DE20 19000 1 0.23 LD 0.0 0.0 Total dose in electrons/square Angstrom: Recording: 104.3 Tracking: 463.7 Focusing: 383.8 Tasks: 34.77 Previews: 0.0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02531_000_0p0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02532_001_0p0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02533_002_0p0 Measured defocus = -4.96 microns drift = 1.01 nm/sec Need regular tracking - Need autofocus Tracking image shifted -0.006, 0.043 um; position 0.005, 0.333 Measured defocus = -3.81 microns drift = 0.53 nm/sec Tracking image shifted -0.003, 0.011 um; position 0.008, 0.322 8 summed frames were saved to D:\RawFrames\DE20\20170928_02535_HA_fast2_000_18p0 Saved Z = 0 at 0.00 min Tilt = 18.00 Mean = 2481 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.008 0.322 3.714 Need regular tracking - Need autofocus Tracking image shifted 0.033, 0.101 um; position -0.025, 0.221 Measured defocus = -4.06 microns drift = 0.21 nm/sec Tracking image shifted 0.006, 0.001 um; position -0.031, 0.220 8 summed frames were saved to D:\RawFrames\DE20\20170928_02536_HA_fast2_001_15p1 Record image shifted 0.007, -0.002 um Tracking reference shifted by 2.1,7.3 pixels, 0.007,-0.002 um Saved Z = 1 at 0.77 min Tilt = 15.15 Mean = 2491 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.038 0.222 3.778 Predicted X = -0.084 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.122 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 3.841 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.027, -0.038 um; position -0.057, 0.160 Measured defocus = -3.86 microns drift = 0.76 nm/sec Tracking image shifted -0.004, -0.021 um; position -0.053, 0.181 8 summed frames were saved to D:\RawFrames\DE20\20170928_02537_HA_fast2_002_12p3 Record image shifted -0.008, 0.000 um Tracking reference shifted by -0.4,-8.7 pixels, -0.008,0.000 um Saved Z = 2 at 1.54 min Tilt = 12.25 Mean = 2496 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.045 0.181 3.699 Errors in X/Y Prediction 0.039 0.059 um, 5.3 7.9 % Error in Z Prediction -0.142 Predicted X = -0.051 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.100 StdErr = 0.044 nFit = 3 nDrop = 0 Predicted Z = 3.716 StdErr = 0.106 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.008, -0.044 um; position -0.044, 0.145 Measured defocus = -4.03 microns drift = 0.15 nm/sec Tracking image shifted -0.003, -0.006 um; position -0.041, 0.151 8 summed frames were saved to D:\RawFrames\DE20\20170928_02538_HA_fast2_003_9p3 Record image shifted 0.004, 0.009 um Tracking reference shifted by -10.1,3.9 pixels, 0.004,0.009 um Saved Z = 3 at 2.31 min Tilt = 9.32 Mean = 2501 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.044 0.141 3.744 Errors in X/Y Prediction 0.007 0.041 um, 1.0 5.5 % Error in Z Prediction 0.028 Predicted X = -0.044 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.101 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Z = 3.706 StdErr = 0.091 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.000, -0.008 um; position -0.044, 0.108 8 summed frames were saved to D:\RawFrames\DE20\20170928_02539_HA_fast2_004_6p4 Record image shifted 0.001, 0.002 um Tracking reference shifted by -2.5,1.2 pixels, 0.001,0.002 um Saved Z = 4 at 2.80 min Tilt = 6.36 Mean = 2502 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.045 0.106 3.706 Errors in X/Y Prediction -0.001 0.005 um, 0.2 0.7 % Predicted X = -0.046 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.068 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Z = 3.689 StdErr = 0.121 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.03 microns drift = 0.27 nm/sec 8 summed frames were saved to D:\RawFrames\DE20\20170928_02540_HA_fast2_005_3p4 Record image shifted -0.004, -0.013 um Saved Z = 5 at 3.34 min Tilt = 3.38 Mean = 2504 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.042 0.081 3.715 Errors in X/Y Prediction 0.004 0.013 um, 0.5 1.8 % Error in Z Prediction 0.026 Predicted X = -0.039 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.063 StdErr = 0.004 nFit = 4 nDrop = 0 Predicted Z = 3.726 StdErr = 0.053 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.007, 0.006 um; position -0.032, 0.057 8 summed frames were saved to D:\RawFrames\DE20\20170928_02541_HA_fast2_006_0p4 Record image shifted 0.001, 0.002 um Tracking reference shifted by -2.3,0.6 pixels, 0.001,0.002 um Saved Z = 6 at 3.84 min Tilt = 0.39 Mean = 2506 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.033 0.055 3.726 Errors in X/Y Prediction 0.006 -0.008 um, 0.9 1.1 % Predicted X = -0.023 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.035 StdErr = 0.009 nFit = 4 nDrop = 0 Predicted Z = 3.728 StdErr = 0.064 nFit = 3 nDrop = 0 Need new track reference - 8 summed frames were saved to D:\RawFrames\DE20\20170928_02542_HA_fast2_007_-2p6 Record image shifted -0.013, 0.025 um Saved Z = 7 at 3.92 min Tilt = -2.61 Mean = 2509 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.010 0.010 3.728 Errors in X/Y Prediction 0.013 -0.025 um, 1.8 3.4 % Predicted X = 0.012 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.041 StdErr = 0.010 nFit = 4 nDrop = 0 Predicted Z = 3.730 StdErr = 0.076 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.006, 0.011 um; position 0.018, -0.052 Measured defocus = -4.01 microns drift = 0.46 nm/sec Tracking image shifted 0.000, -0.019 um; position 0.018, -0.033 8 summed frames were saved to D:\RawFrames\DE20\20170928_02543_HA_fast2_008_-5p6 Record image shifted 0.005, -0.008 um Tracking reference shifted by 8.6,5.9 pixels, 0.005,-0.008 um Saved Z = 8 at 4.73 min Tilt = -5.61 Mean = 2510 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.012 -0.025 3.743 Errors in X/Y Prediction -0.000 0.017 um, 0.0 2.2 % Error in Z Prediction 0.013 Predicted X = 0.035 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.070 StdErr = 0.019 nFit = 4 nDrop = 0 Predicted Z = 3.736 StdErr = 0.036 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.020, 0.001 um; position 0.015, -0.072 8 summed frames were saved to D:\RawFrames\DE20\20170928_02544_HA_fast2_009_-8p6 Record image shifted 0.002, 0.010 um Tracking reference shifted by -10.8,1.9 pixels, 0.002,0.010 um Saved Z = 9 at 5.22 min Tilt = -8.60 Mean = 2508 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.013 -0.082 3.736 Errors in X/Y Prediction -0.022 -0.012 um, 2.9 1.6 % Predicted X = 0.014 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.137 StdErr = 0.022 nFit = 4 nDrop = 0 Predicted Z = 3.737 StdErr = 0.041 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.002, -0.027 um; position 0.012, -0.109 8 summed frames were saved to D:\RawFrames\DE20\20170928_02545_HA_fast2_010_-11p6 Record image shifted 0.002, 0.010 um Tracking reference shifted by -10.3,2.4 pixels, 0.002,0.010 um Saved Z = 10 at 5.72 min Tilt = -11.56 Mean = 2507 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.010 -0.119 3.737 Errors in X/Y Prediction -0.004 0.017 um, 0.5 2.4 % Predicted X = 0.007 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.168 StdErr = 0.028 nFit = 4 nDrop = 0 Predicted Z = 3.738 StdErr = 0.046 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.013, 0.036 um; position -0.007, -0.204 8 summed frames were saved to D:\RawFrames\DE20\20170928_02546_HA_fast2_011_-14p5 Record image shifted 0.024, 0.051 um Tracking reference shifted by -54.1,25.2 pixels, 0.024,0.051 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 11 at 6.21 min Tilt = -14.49 Mean = 2503 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.030 -0.255 3.738 Errors in X/Y Prediction -0.037 -0.087 um, 5.0 11.7 % Predicted X = -0.070 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.400 StdErr = 0.078 nFit = 4 nDrop = 0 Predicted Z = 3.738 StdErr = 0.051 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.040, -0.081 um; position -0.030, -0.319 Measured defocus = -4.35 microns drift = 0.83 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.89 microns drift = 1.37 nm/sec Tracking image shifted 0.019, -0.050 um; position -0.049, -0.269 8 summed frames were saved to D:\RawFrames\DE20\20170928_02547_HA_fast2_012_-17p4 Record image shifted 0.030, -0.028 um Tracking reference shifted by 30.4,32.3 pixels, 0.030,-0.028 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 12 at 7.10 min Tilt = -17.39 Mean = 2507 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.080 -0.241 3.993 Errors in X/Y Prediction -0.009 0.160 um, 1.3 21.5 % Error in Z Prediction 0.254 Predicted X = -0.129 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.263 StdErr = 0.164 nFit = 4 nDrop = 0 Predicted Z = 4.008 StdErr = 0.110 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.051, 0.054 um; position -0.079, -0.317 Measured defocus = -4.05 microns drift = 0.81 nm/sec Tracking image shifted 0.005, -0.026 um; position -0.084, -0.292 8 summed frames were saved to D:\RawFrames\DE20\20170928_02548_HA_fast2_013_-20p3 Record image shifted 0.018, -0.027 um Tracking reference shifted by 29.3,18.7 pixels, 0.018,-0.027 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 13 at 7.90 min Tilt = -20.26 Mean = 2504 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.102 -0.264 4.068 Errors in X/Y Prediction 0.028 -0.001 um, 3.7 0.1 % Error in Z Prediction 0.060 Predicted X = -0.123 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.185 StdErr = 0.124 nFit = 4 nDrop = 0 Predicted Z = 4.128 StdErr = 0.011 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.026, 0.150 um; position -0.098, -0.335 8 summed frames were saved to D:\RawFrames\DE20\20170928_02549_HA_fast2_014_-23p1 Record image shifted 0.015, -0.012 um Tracking reference shifted by 13.1,16.3 pixels, 0.015,-0.012 um Saved Z = 14 at 8.42 min Tilt = -23.08 Mean = 2495 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.113 -0.322 4.128 Errors in X/Y Prediction 0.011 -0.137 um, 1.4 18.5 % Predicted X = -0.124 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.417 StdErr = 0.002 nFit = 4 nDrop = 0 Predicted Z = 4.192 StdErr = 0.013 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.004, -0.072 um; position -0.120, -0.345 8 summed frames were saved to D:\RawFrames\DE20\20170928_02550_HA_fast2_015_-25p8 Record image shifted 0.001, 0.020 um Tracking reference shifted by -21.6,1.1 pixels, 0.001,0.020 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 15 at 8.90 min Tilt = -25.83 Mean = 2488 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.121 -0.365 4.192 Errors in X/Y Prediction 0.003 0.052 um, 0.4 7.0 % Predicted X = -0.130 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.430 StdErr = 0.033 nFit = 4 nDrop = 0 Predicted Z = 4.256 StdErr = 0.014 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.014, 0.001 um; position -0.115, -0.431 8 summed frames were saved to D:\RawFrames\DE20\20170928_02551_HA_fast2_016_-28p5 Record image shifted 0.015, -0.017 um Tracking reference shifted by 18.2,15.7 pixels, 0.015,-0.017 um Saved Z = 16 at 9.41 min Tilt = -28.53 Mean = 2487 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.130 -0.414 4.256 Errors in X/Y Prediction -0.000 0.016 um, 0.0 2.2 % Predicted X = -0.139 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.453 StdErr = 0.014 nFit = 4 nDrop = 0 Predicted Z = 4.320 StdErr = 0.016 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.002, -0.028 um; position -0.137, -0.425 Measured defocus = -3.88 microns drift = 0.37 nm/sec Tracking image shifted 0.008, -0.014 um; position -0.145, -0.411 8 summed frames were saved to D:\RawFrames\DE20\20170928_02552_HA_fast2_017_-31p2 Record image shifted -0.000, 0.034 um Tracking reference shifted by -36.3,0.1 pixels, -0.000,0.034 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 17 at 10.20 min Tilt = -31.16 Mean = 2478 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.145 -0.444 4.210 Errors in X/Y Prediction -0.007 0.008 um, 0.9 1.1 % Error in Z Prediction -0.111 Predicted X = -0.156 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = -0.475 StdErr = 0.016 nFit = 4 nDrop = 0 Predicted Z = 4.255 StdErr = 0.039 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.017, 0.036 um; position -0.140, -0.511 8 summed frames were saved to D:\RawFrames\DE20\20170928_02553_HA_fast2_018_-33p7 Record image shifted 0.016, -0.002 um Tracking reference shifted by 2.2,17.3 pixels, 0.016,-0.002 um Saved Z = 18 at 10.71 min Tilt = -33.73 Mean = 2468 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.156 -0.509 4.255 Errors in X/Y Prediction 0.000 -0.034 um, 0.0 4.6 % Predicted X = -0.170 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.568 StdErr = 0.035 nFit = 4 nDrop = 0 Predicted Z = 4.296 StdErr = 0.044 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.006, -0.036 um; position -0.164, -0.532 8 summed frames were saved to D:\RawFrames\DE20\20170928_02554_HA_fast2_019_-36p2 Record image shifted 0.001, 0.028 um Tracking reference shifted by -30.4,1.6 pixels, 0.001,0.028 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 19 at 11.20 min Tilt = -36.22 Mean = 2462 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.166 -0.560 4.296 Errors in X/Y Prediction 0.004 0.008 um, 0.6 1.0 % Predicted X = -0.176 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.634 StdErr = 0.031 nFit = 4 nDrop = 0 Predicted Z = 4.337 StdErr = 0.049 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.015, 0.001 um; position -0.161, -0.635 8 summed frames were saved to D:\RawFrames\DE20\20170928_02555_HA_fast2_020_-38p6 Record image shifted 0.016, -0.006 um Tracking reference shifted by 6.2,17.1 pixels, 0.016,-0.006 um Saved Z = 20 at 11.71 min Tilt = -38.64 Mean = 2459 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.177 -0.630 4.337 Errors in X/Y Prediction -0.001 0.004 um, 0.1 0.6 % Predicted X = -0.187 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.694 StdErr = 0.020 nFit = 4 nDrop = 0 Predicted Z = 4.378 StdErr = 0.054 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.007, -0.039 um; position -0.180, -0.655 8 summed frames were saved to D:\RawFrames\DE20\20170928_02556_HA_fast2_021_-41p0 Record image shifted 0.001, 0.027 um Tracking reference shifted by -28.5,0.8 pixels, 0.001,0.027 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 21 at 12.20 min Tilt = -40.98 Mean = 2443 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.181 -0.682 4.378 Errors in X/Y Prediction 0.006 0.012 um, 0.8 1.6 % Predicted X = -0.190 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = -0.743 StdErr = 0.023 nFit = 4 nDrop = 0 Predicted Z = 4.419 StdErr = 0.060 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.014, 0.006 um; position -0.176, -0.749 Measured defocus = -3.78 microns drift = 0.40 nm/sec Tracking image shifted 0.004, -0.016 um; position -0.179, -0.732 8 summed frames were saved to D:\RawFrames\DE20\20170928_02557_HA_fast2_022_-43p2 Record image shifted 0.015, 0.006 um Tracking reference shifted by -5.9,15.8 pixels, 0.015,0.006 um Saved Z = 22 at 13.00 min Tilt = -43.25 Mean = 2445 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.194 -0.738 4.219 Measured defocus = -3.79 microns drift = 1.47 nm/sec Errors in X/Y Prediction -0.005 0.005 um, 0.6 0.7 % Error in Z Prediction -0.200 Need regular tracking - Need autofocus Tracking image shifted -0.039, -0.086 um; position -0.247, 0.797 Measured defocus = -4.01 microns drift = 1.48 nm/sec Tracking image shifted -0.011, 0.064 um; position -0.237, 0.733 8 summed frames were saved to D:\RawFrames\DE20\20170928_02558_HA_fast2_023_20p9 Record image shifted -0.007, 0.012 um Tracking reference shifted by -13.0,-8.0 pixels, -0.007,0.012 um Saved Z = 23 at 14.75 min Tilt = 20.85 Mean = 2472 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.229 0.721 4.051 Need regular tracking - Need autofocus Tracking image shifted -0.024, 0.049 um; position -0.205, 0.672 Measured defocus = -3.89 microns drift = 0.87 nm/sec Tracking image shifted -0.012, 0.030 um; position -0.193, 0.641 8 summed frames were saved to D:\RawFrames\DE20\20170928_02559_HA_fast2_024_23p7 Record image shifted -0.000, -0.004 um Tracking reference shifted by 4.0,-0.3 pixels, -0.000,-0.004 um Saved Z = 24 at 15.52 min Tilt = 23.66 Mean = 2462 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.192 0.645 3.954 Predicted X = -0.156 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.569 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 3.857 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.006, -0.030 um; position -0.150, 0.598 Measured defocus = -3.86 microns drift = 0.92 nm/sec Tracking image shifted -0.027, 0.023 um; position -0.123, 0.575 8 summed frames were saved to D:\RawFrames\DE20\20170928_02560_HA_fast2_025_26p4 Record image shifted -0.008, 0.002 um Tracking reference shifted by -2.7,-9.0 pixels, -0.008,0.002 um Saved Z = 25 at 16.29 min Tilt = 26.40 Mean = 2454 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.115 0.573 3.724 Errors in X/Y Prediction 0.041 0.004 um, 5.5 0.6 % Error in Z Prediction -0.132 Predicted X = -0.037 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.498 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Z = 3.583 StdErr = 0.099 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.042, -0.045 um; position -0.079, 0.543 8 summed frames were saved to D:\RawFrames\DE20\20170928_02561_HA_fast2_026_29p1 Record image shifted 0.005, 0.013 um Tracking reference shifted by -13.7,5.6 pixels, 0.005,0.013 um Saved Z = 26 at 16.78 min Tilt = 29.09 Mean = 2444 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.084 0.530 3.583 Errors in X/Y Prediction -0.047 0.032 um, 6.3 4.3 % Predicted X = -0.053 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.468 StdErr = 0.022 nFit = 3 nDrop = 0 Predicted Z = 3.420 StdErr = 0.130 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.003, -0.005 um; position -0.056, 0.473 Measured defocus = -4.37 microns drift = 0.75 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.89 microns drift = 0.98 nm/sec Tracking image shifted -0.015, 0.038 um; position -0.041, 0.435 8 summed frames were saved to D:\RawFrames\DE20\20170928_02562_HA_fast2_027_31p7 Record image shifted 0.005, -0.002 um Tracking reference shifted by 2.1,5.3 pixels, 0.005,-0.002 um Saved Z = 27 at 17.62 min Tilt = 31.71 Mean = 2437 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.046 0.437 3.696 Errors in X/Y Prediction 0.007 -0.031 um, 1.0 4.2 % Error in Z Prediction 0.276 Predicted X = -0.013 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = 0.377 StdErr = 0.038 nFit = 3 nDrop = 0 Predicted Z = 3.590 StdErr = 0.194 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.009, -0.026 um; position -0.022, 0.403 Measured defocus = -4.08 microns drift = 0.62 nm/sec Tracking image shifted -0.010, 0.027 um; position -0.013, 0.376 8 summed frames were saved to D:\RawFrames\DE20\20170928_02563_HA_fast2_028_34p3 Record image shifted 0.001, 0.002 um Tracking reference shifted by -1.7,1.4 pixels, 0.001,0.002 um Saved Z = 28 at 18.40 min Tilt = 34.26 Mean = 2420 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = -0.014 0.375 3.692 Errors in X/Y Prediction -0.001 -0.002 um, 0.2 0.3 % Error in Z Prediction 0.103 Predicted X = 0.022 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = 0.283 StdErr = 0.054 nFit = 4 nDrop = 0 Predicted Z = 3.678 StdErr = 0.009 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.014, -0.050 um; position 0.008, 0.333 8 summed frames were saved to D:\RawFrames\DE20\20170928_02564_HA_fast2_029_36p7 Record image shifted -0.000, 0.010 um Tracking reference shifted by -11.0,-0.1 pixels, -0.000,0.010 um Saved Z = 29 at 18.90 min Tilt = 36.74 Mean = 2402 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.008 0.323 3.678 Errors in X/Y Prediction -0.014 0.040 um, 1.9 5.4 % Predicted X = 0.037 StdErr = 0.007 nFit = 3 nDrop = 0 Predicted Y = 0.297 StdErr = 0.014 nFit = 4 nDrop = 0 Predicted Z = 3.667 StdErr = 0.011 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.004, 0.046 um; position 0.033, 0.251 8 summed frames were saved to D:\RawFrames\DE20\20170928_02565_HA_fast2_030_39p1 Record image shifted -0.006, 0.022 um Tracking reference shifted by -23.2,-6.7 pixels, -0.006,0.022 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 30 at 19.39 min Tilt = 39.14 Mean = 2389 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.040 0.229 3.667 Errors in X/Y Prediction 0.003 -0.068 um, 0.4 9.1 % Predicted X = 0.065 StdErr = 0.007 nFit = 3 nDrop = 0 Predicted Y = 0.132 StdErr = 0.034 nFit = 4 nDrop = 0 Predicted Z = 3.656 StdErr = 0.013 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.015, -0.118 um; position 0.050, 0.250 8 summed frames were saved to D:\RawFrames\DE20\20170928_02566_HA_fast2_031_41p5 Record image shifted -0.027, 0.054 um Tracking reference shifted by -57.8,-28.6 pixels, -0.027,0.054 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 31 at 19.90 min Tilt = 41.47 Mean = 2371 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.077 0.196 3.656 Errors in X/Y Prediction 0.012 0.064 um, 1.6 8.6 % Predicted X = 0.111 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = 0.147 StdErr = 0.068 nFit = 4 nDrop = 0 Predicted Z = 3.645 StdErr = 0.015 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.023, -0.063 um; position 0.087, 0.211 Measured defocus = -3.84 microns drift = 0.81 nm/sec Tracking image shifted -0.014, 0.048 um; position 0.102, 0.163 8 summed frames were saved to D:\RawFrames\DE20\20170928_02567_HA_fast2_032_43p7 Record image shifted -0.023, 0.059 um Tracking reference shifted by -62.6,-24.3 pixels, -0.023,0.059 um Getting a new tracking reference after Record to reduce reference conflicts Saved Z = 32 at 20.70 min Tilt = 43.72 Mean = 2352 C2 = 51.99% dose = 3.16 e/A2 X/Y/Z = 0.124 0.104 3.532 2017/09/28 15:56 D:\serialem\hwei\092817\HA_fast2.st 0 33 3712 4984 1221 18.0 43.7 3.00 COS 20.7 1x1 DE20 19000 1 0.23 LD 0.0 0.0 Total dose in electrons/square Angstrom: Recording: 104.3 Tracking: 463.7 Focusing: 479.7 Tasks: 35.70 Previews: 0.0 The original displacements in the overlap zones have mean 96.94 maximum 291.29 pixels. After shifting pieces into register, the displacements have mean 5.02 maximum 15.16 pixels. Measured defocus = 0.00 microns drift = 0.00 nm/sec Trimming A by 31 36, reference by 46 61 Trimming A by 139 171, reference by 46 61 Trimming A by 48 46, reference by 46 61 Rough eucentricity: changing Z by -45.58 to -45.53, continuing... Trimming A by 21 21, reference by 41 41 Trimming A by 21 21, reference by 41 41 Trimming A by 21 21, reference by 41 41 Rough eucentricity: changing Z by 11.28 to -34.25, finished. Trimming A by 78 141, reference by 21 21 Trimming A by 21 21, reference by 60 151 Refining eucentricity: Fit to 8 positions gives tilt axis Z displacement of -5.29 microns and lateral displacement of -44.10 microns Rough eucentricity: changing Z by 96.59 to 67.62, continuing... Rough eucentricity: changing Z by -8.03 to 59.58, finished. Refining eucentricity: Fit to 6 positions gives tilt axis Z displacement of 13.43 microns and lateral displacement of 66.17 microns Rough eucentricity: changing Z by -31.32 to 84.66, continuing... Rough eucentricity: changing Z by -0.37 to 84.29, finished. Refining eucentricity: Fit to 8 positions gives tilt axis Z displacement of -0.31 microns and lateral displacement of -0.12 microns Measured defocus = 11.38 microns drift = 0.33 nm/sec Measured defocus = -6.84 microns drift = 0.24 nm/sec Measured defocus = -3.84 microns drift = 0.72 nm/sec Need regular tracking - Need autofocus Tracking image shifted -0.011, 0.036 um; position 0.140, 0.010 Measured defocus = -4.11 microns drift = 0.52 nm/sec Tracking image shifted -0.001, 0.011 um; position 0.130, 0.005 Measured defocus = -6.01 microns drift = 0.54 nm/sec Measured defocus = -3.45 microns drift = 0.83 nm/sec Need regular tracking - Need autofocus Tracking image shifted -0.001, 0.038 um; position 0.114, 0.656 Measured defocus = -4.12 microns drift = 0.57 nm/sec Tracking image shifted 0.004, 0.011 um; position 0.110, 0.645 8 summed frames were saved to D:\RawFrames\DE20\20170928_02575_IR_fast1_000_18p0 Saved Z = 0 at -0.00 min Tilt = 18.00 Mean = 3514 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.110 0.645 8.987 Need regular tracking - Need autofocus Tracking image shifted 0.023, 0.092 um; position 0.088, 0.553 Measured defocus = -4.00 microns drift = 0.15 nm/sec Tracking image shifted 0.004, 0.001 um; position 0.083, 0.552 8 summed frames were saved to D:\RawFrames\DE20\20170928_02576_IR_fast1_001_15p1 Record image shifted -0.000, -0.003 um Tracking reference shifted by 3.4,-0.5 pixels, -0.000,-0.003 um Saved Z = 1 at 0.78 min Tilt = 15.15 Mean = 3528 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.084 0.555 8.985 Predicted X = 0.057 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.465 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 8.983 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.012, -0.013 um; position 0.069, 0.478 Measured defocus = -4.09 microns drift = 0.11 nm/sec Tracking image shifted 0.005, -0.001 um; position 0.064, 0.479 8 summed frames were saved to D:\RawFrames\DE20\20170928_02577_IR_fast1_002_12p3 Record image shifted -0.001, -0.006 um Tracking reference shifted by 6.4,-1.0 pixels, -0.001,-0.006 um Saved Z = 2 at 1.56 min Tilt = 12.25 Mean = 3537 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.065 0.485 9.072 Errors in X/Y Prediction 0.008 0.020 um, 1.1 2.6 % Error in Z Prediction 0.089 Predicted X = 0.047 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.402 StdErr = 0.015 nFit = 3 nDrop = 0 Predicted Z = 9.100 StdErr = 0.067 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.003, -0.019 um; position 0.050, 0.420 8 summed frames were saved to D:\RawFrames\DE20\20170928_02578_IR_fast1_003_9p3 Record image shifted -0.001, -0.008 um Tracking reference shifted by 8.9,-1.4 pixels, -0.001,-0.008 um Saved Z = 3 at 2.05 min Tilt = 9.32 Mean = 3536 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.051 0.429 9.100 Errors in X/Y Prediction 0.005 0.027 um, 0.6 3.6 % Predicted X = 0.038 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.363 StdErr = 0.010 nFit = 3 nDrop = 0 Predicted Z = 9.142 StdErr = 0.088 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted -0.001, 0.003 um; position 0.038, 0.360 Measured defocus = -4.03 microns drift = 0.21 nm/sec Tracking image shifted 0.007, -0.003 um; position 0.031, 0.363 8 summed frames were saved to D:\RawFrames\DE20\20170928_02579_IR_fast1_004_6p4 Record image shifted -0.001, -0.010 um Tracking reference shifted by 10.7,-1.4 pixels, -0.001,-0.010 um Saved Z = 4 at 2.83 min Tilt = 6.36 Mean = 3551 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.032 0.373 9.174 Errors in X/Y Prediction -0.005 0.010 um, 0.7 1.4 % Error in Z Prediction 0.032 Predicted X = 0.013 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.317 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Z = 9.240 StdErr = 0.033 nFit = 3 nDrop = 0 8 summed frames were saved to D:\RawFrames\DE20\20170928_02580_IR_fast1_005_3p4 Record image shifted -0.001, -0.011 um Saved Z = 5 at 2.91 min Tilt = 3.38 Mean = 3564 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.015 0.328 9.240 Errors in X/Y Prediction 0.001 0.011 um, 0.2 1.5 % Predicted X = -0.003 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.287 StdErr = 0.007 nFit = 4 nDrop = 0 Predicted Z = 9.301 StdErr = 0.039 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.031, 0.047 um; position 0.028, 0.240 8 summed frames were saved to D:\RawFrames\DE20\20170928_02581_IR_fast1_006_0p4 Record image shifted -0.001, -0.012 um Tracking reference shifted by 12.4,-1.2 pixels, -0.001,-0.012 um Saved Z = 6 at 3.40 min Tilt = 0.38 Mean = 3553 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.029 0.252 9.301 Errors in X/Y Prediction 0.032 -0.035 um, 4.3 4.7 % Predicted X = 0.043 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.175 StdErr = 0.028 nFit = 4 nDrop = 0 Predicted Z = 9.363 StdErr = 0.047 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Tracking image shifted 0.011, 0.004 um; position 0.032, 0.171 Measured defocus = -3.97 microns drift = 0.34 nm/sec Tracking image shifted 0.013, -0.004 um; position 0.020, 0.175 8 summed frames were saved to D:\RawFrames\DE20\20170928_02582_IR_fast1_007_-2p6 Record image shifted -0.001, -0.011 um Tracking reference shifted by 12.2,-1.3 pixels, -0.001,-0.011 um Saved Z = 7 at 4.18 min Tilt = -2.61 Mean = 3559 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.021 0.187 9.330 Errors in X/Y Prediction -0.022 0.011 um, 3.0 1.5 % Error in Z Prediction -0.033 Predicted X = 0.013 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.100 StdErr = 0.029 nFit = 4 nDrop = 0 Predicted Z = 9.381 StdErr = 0.003 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.001, 0.019 um; position 0.012, 0.081 8 summed frames were saved to D:\RawFrames\DE20\20170928_02583_IR_fast1_008_-5p6 Record image shifted -0.001, -0.011 um Tracking reference shifted by 11.6,-1.1 pixels, -0.001,-0.011 um Saved Z = 8 at 4.68 min Tilt = -5.61 Mean = 3552 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = 0.013 0.092 9.381 Errors in X/Y Prediction 0.000 -0.008 um, 0.1 1.1 % Predicted X = 0.006 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.001 StdErr = 0.027 nFit = 4 nDrop = 0 Predicted Z = 9.433 StdErr = 0.003 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted 0.029, -0.034 um; position -0.023, 0.034 8 summed frames were saved to D:\RawFrames\DE20\20170928_02584_IR_fast1_009_-8p6 Record image shifted -0.001, -0.010 um Tracking reference shifted by 10.8,-0.8 pixels, -0.001,-0.010 um Saved Z = 9 at 5.51 min Tilt = -8.59 Mean = 3551 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = -0.023 0.044 9.433 Errors in X/Y Prediction -0.029 0.044 um, 3.9 6.0 % Predicted X = -0.059 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = -0.015 StdErr = 0.049 nFit = 4 nDrop = 0 Predicted Z = 9.484 StdErr = 0.004 nFit = 3 nDrop = 0 Need regular tracking - Tracking image shifted -0.016, 0.006 um; position -0.042, -0.022 8 summed frames were saved to D:\RawFrames\DE20\20170928_02585_IR_fast1_010_-11p6 Record image shifted -0.001, -0.009 um Tracking reference shifted by 9.1,-0.7 pixels, -0.001,-0.009 um Saved Z = 10 at 6.01 min Tilt = -11.56 Mean = 3548 C2 = 51.51% dose = 4.43 e/A2 X/Y/Z = -0.042 -0.013 9.484